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#Product Trends

XCEL Work Station for Die Inspection & Sorting

The application is for pressure sensors on semiconductor

The machine performs an accurate optical inspection (AOI) of a silicon wafer, then the ejection and the sorting of good/bad die. The machine is equipped with 3 high magnification cameras (with resolutions of a few microns), 2 of them run the top side inspection of the microcircuits at different magnifications and the third one checks the quality of the bottom side pedestal , once the die is ejected and moved on the bottom camera. The management software of the tool is connected to the corporate network, from which it receives in real time the recipes and the inspection parameters to be run. The outcome is a mapping of each wafer and a storage of the defect numbers and the types that allows to process a quality statistical analysis of the production process.

Details

  • Aurel Automation S.p.A.

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