#White Papers
White Paper Explains Design and Preparation of NanoPositioners for High Vacuum by PI (Physik Instrumente) L.P.
Vacuum and UHV applications in research and industry are increasing in importance as testing and manufacturing specifically require vacuum or cryogenic environments.
For decades, PI has provided stages and systems for vacuum levels from 10-3 mbar to 10-9 mbar that deliver reliable motion control for positioning and alignment. The newest catalog from PI - Precision Motion and Positioning Solutions for High Vacuum and UHV – demonstrates PI’s expert design capabilities as most standard products are created with vacuum compatibility in mind, from linear and rotary stages to 6-axis hexapods.
“Throughout the worldwide research and development field, vacuum environments are used, from small epitaxy processes up to the large beamline facilities.”, states Dr. Jürgen Gallus, technical engineer responsible for PI vacuum technology research and development. Dr. Gallus’ whitepaper, “Motion and Positioning in Vacuum Environments”, delves into the specific consideration that must be given, when designing a vacuum system, to operating speed, stage lifetime expectancy, use of lubricants and coatings, material selection, outbakeing temperatures for high and ultra-high vacuums, and more.
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White Paper Explains Design and Preparation of NanoPositioners for High Vacuum by PI (Physik Instrumente) L.P.
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Motion Control and Precision Positioning in Vacuum Environments
PI (Physik Instrumente) L.P.
September 2016
Motion ControlSystemsMachine ControllerMotion Controllers
Download the White Paper
Vacuum and UHV applications in research and industry are increasing in importance as testing and manufacturing specifically require vacuum or cryogenic environments.
For decades, PI has provided stages and systems for vacuum levels from 10-3 mbar to 10-9 mbar that deliver reliable motion control for positioning and alignment. The newest catalog from PI - Precision Motion and Positioning Solutions for High Vacuum and UHV – demonstrates PI’s expert design capabilities as most standard products are created with vacuum compatibility in mind, from linear and rotary stages to 6-axis hexapods.
“Throughout the worldwide research and development field, vacuum environments are used, from small epitaxy processes up to the large beamline facilities.”, states Dr. Jürgen Gallus, technical engineer responsible for PI vacuum technology research and development. Dr. Gallus’ whitepaper, “Motion and Positioning in Vacuum Environments”, delves into the specific consideration that must be given, when designing a vacuum system, to operating speed, stage lifetime expectancy, use of lubricants and coatings, material selection, outbakeing temperatures for high and ultra-high vacuums, and more.
Download the Precision Motion and Positioning Solutions for High Vacuum and UHV Catalog
Download the whitepaper “Motion and Positioning in Vacuum Environments”
Read the article “Advances in Precision Positioning Stage Design-Optimized Outgassing and Motion Performance in Ultra-High Vacuum Applications”
Watch Video
Learn more about Vacuum Stages & Actuators
Standard and Custom
In addition to a large variety of standard piezoelectric and mechanical stages, PI can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the application.
About PI
PI is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eleven subsidiaries, R&D / engineering on 3 continents and total staff of 850+