PI (Physik Instrumente) L.P. Miniature Translation/Rotation Stage Family Comes with Piezo Scanner Option

PI, a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, semiconductor and life science applications offers one of the smallest motorized stage families in the world, capable of delivering 50 nanometer incremental motion. One to 4 Axis Systems, Very Compact, from 62x60 mm Footprint

The M-110 series translation stages provide linear motion of 5, 15 and 25 mm. X, XY and XYZ systems are available, and can be combined with the M-116 miniature rotary stage. The systems can also be equipped with high-speed piezo drives for scanning or positioning with nanometer precision.

Typical Applications:

Biotechnology, Metrology, Micromachining, Medical technology, Micromanipulation, Photonics Packaging

Features & Advantages:

Folded Drives Provide Footprint as small as 62x60 mm (~2.5x2.4 in)

50 nm True Minimum Incremental Motion (7 nm Motor / Encoder Resolution!)

5, 15 and 25 mm Linear Travel Ranges, 360 deg. Rotary Range

Choice of Lead Screw Drives (lower cost) and Ball Screw Drives (Higher Speed / Continuous Operation)

Choice of Closed-Loop DC Motors (higher precision) and Stepper Motors (Lower Cost)

Integrated Hall-Effect Limit and Reference Switches

Piezo Option for fast Scanning / Positioning with 1 nm Resolution

Choice of Motors and Drives:

Lead screws (higher resolution) and ball screws (higher speed / longer lifetime) are offered, driven by stepper motors (lower cost) and closed-loop servo motors (higher precision). The encoder on the DC servo motor version features 0.007 µm resolution per count.

Hybrid Option with High-Speed Piezo Scanner:

For applications requiring extremely high resolution or very fast scanning, a closed-loop piezo scanner can be mounted on the stages. It provides 1 nm resolution and response times of a few milliseconds.

Controllers:

A large variety of PC-plug-in and stand-alone controllers are offered to suit all needs. Software for alignment applications is also available.