Compact XYZ-Micropositioning Stages with Piezo Option

M-110, M-111 and M-112 micropositioning systems from PI are very compact, ultra-high resolution, motorized translation stages providing linear motion of 5, 15 and 25 mm

They deliver 50 nm minimum incremental motion and can be equipped with piezo drives for fast scanning and even higher resolution (1 nm). X, XY and XYZ systems are available.

Typical Applications: Metrology, Micromachining, Medical technology, Micromanipulation, Bio-Technology, Photonics packaging automation, Quality control, Test equipment

Features & Advantages:

Folded Drives Provide Smaller Footprint

0.05 µm Minimum Incremental Motion (0.007 µm Design Resolution)

5, 15 and 25 mm Travel Ranges

Lead Screw Drives (lower cost) and Ball Screw Drives (continuous operation)

Closed-Loop DC Motors (higher precision) and Stepper Motors (lower cost)

Integrated Hall-Effect Limit and Reference Switches

Piezo Option for fast Scanning / Positioning with 1 nm Resolution

Choice of Motors and Drives

The stages were designed to provide a cost effective solution for research and industrial applications. Lead screws and ball screws (for continuous operation) are offered, driven by stepper motors (lower cost) and closed-loop servo motors (higher precision). The encoder on the DC servo motor version features 0.007 µm resolution per count.

Non-Contact Limit and Reference Switches

Non-contacting precision Hall-effect homing sensors are installed to facilitate automation processes. Limit switches protect the mechanics from damage.

Hybrid Option with High-Speed Piezo Scanner

For applications requiring extremely high resolution or very fast scanning, a closed-loop piezo scanner can be mounted on the stages. It provides 1 nm resolution and response times of a few milliseconds.

X, XY, XZ and XYZ Systems

M-110, M-111 and M-112 can be combined to form XY, XZ and XYZ systems for multiaxis positioning and alignment applications.

Controllers

A large variety of PC-plug-in and stand-alone controllers are offered to suit all needs. Software for alignment applications is also available.