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Incredibly Small Liquid Flow Sensors

Innovative packaging enables Sensirion''s highly sensitive thermal flow sensor microchips to measure non-invasively through the wall of a flow channel inside a microfluidic planar substrate. This design provides unique sensitivity for liquid flow measurement and bubble detection in the range of 0 to 1000 microliters per minute. The sensors are particularly suitable for monitoring flow rates and improving system performances in biomedical and life science applications.

Non-invasive flow sensing is possible thanks to the high sensitivity achieved with CMOSens® Technology. A small digital CMOSens® microchip (2.2 x 3.5 mm) is bonded to the microfluidic channel substrate. In addition to the sensor element, it houses the complete digital intelligence and the memory necessary for signal linearization, temperature compensation and self-test algorithms. The chip provides a fully digital I²C interface. Electrical contact is made via metallization above the microfluidic substrate. Fluidic ports below facilitate easy integration of discrete sensors into numerous designs. The sensor boasts a short flow sensing response time of 30 ms, and sensor resolutions down to 0.5 nl/min are feasible. A digital microsensor chip provides a fully calibrated digital output, eliminating the need for additional signal conditioning.

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  • Sensirion

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