The newest generation of RF generators

When manufacturing complex microstructures, reproducible plasma processes are the key to consistent results. Thanks to stable power output and a high level of control precision, TRUMPF RF generators offer the best conditions to achieve such results. Now the company has further optimized its innovative RF technology. The TruPlasma RF Series 1000 (G2/13) and the TruPlasma RF 3006 (G2/13) come equipped with additional features to ensure stable processes, increased efficiency, and simple system integration.

New: “Smart Auto Frequency Tuning” for stable processes

TRUMPF RF generators guarantee an extraordinarily stable power supply as a result of CombineLine, its tried-and-trusted RF coupling technology, which is unique to the market.

A new technology now ensures that processes are even more stable. In contrast to current approaches, the integrated “Smart Auto Frequency Tuning” feature does not follow the trial-and-error method, rather it intelligently adjusts the process. The new generators thus allow for uniformly matching parameters and optimal process results.

More efficient, robust and flexible

RF generators from TRUMPF Hüttinger feature a high efficiency of up to 80 percent, which is made possible by the innovative Class D converter topology. The benefit is an up to 50 percent reduction in power loss compared to the market standard, thus resulting in lower costs.

A new fanless cooling concept also makes the new generators more efficient. It not only considerably reduces the demand for cooling water, but also allows for maintenance-free operation and lower downtime.

Yet another technological highlight of the new generators is their wide-ranging power supply of 200 to 480 volts. This makes it easier to adapt to different country voltages and ensures smooth installation anywhere in the world.

More than a generator: RF systems from TRUMPF Hüttinger

TRUMPF Hüttinger focuses on the system concept. The new matchboxes of the TruPlasma Match Series 1000 (G2/13) represent the perfect solution for impedance adjustment and are an ideal addition to the RF generators. Equipped with an innovative signal processing solution, the generators guarantee fast, stable, and reproducible adjustments even in the most difficult processes. The advanced software, as well as improved communication with the generator, ensure perfect interaction within the entire system solution.