High throughput laser treatment of thin film panels
The new laser micromachining system microSCRIBE is suitable for the laser processing of large panel sizes. Depending on the size of the module (e.g. 1300 x 1100mm) the configurations of the system can be customized.
The system can be equipped,with multiple laser sources for increasing the throughput significantly. Scribing speeds of >2m/sec can be achieved. The loading, unloading and alignment of the work pieces are carried out fully automatic and with accuracy in the micrometer range over the entire panel surface.