#Product Trends
Metrology and inspection tools: stable purge flows and chamber pressures
Stable purge flows and chamber pressures keep the measurement baseline from shifting.
In metrology and inspection tools, a small drift in an optic purge, a carrier flow or a chamber pressure shifts the measurement baseline, and averaging does not remove it. A laminar DP mass flow controller turns a fixed restriction into a measured, self-reporting position: it reports mass flow, volumetric flow, absolute pressure and temperature from one body, warms up in under one second and controls from 0.01 to 100% of full scale. For closed or dead-ended chambers, a dual-valve pressure controller holds the pressure precisely, also under vacuum. Low pressure drop controllers suit purges with little inlet pressure, and portable meters verify flows in the field.
