Verification benches for gas panels: a reference ladder that holds 1% of reading

A ladder of laminar DP flow meters covers a few SCCM to thousands of SLPM in one family.

Before a gas panel or a mass flow controller ships to a deposition or etch tool, each channel is checked against a reference and the assembly is leak-tested. Integrators usually require at least 1% of reading across the flow range, and one reference cannot cover a span of about five decades. A ladder of laminar DP flow meters, each used only where it holds the 1% bar, covers a few SCCM to thousands of SLPM in one family, with ±0.5% of reading or ±0.1% of full scale and a repeatability of ±(0.1% of reading + 0.02% of full scale). A low-range meter reads leaks of tens of SCCM, and a pressure gauge with ±0.125% of full scale reads the pressure-decay test. Where the bench must set a flow, a flow controller fits the same footprint and interface.

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Geograaf 24, 6921 EW Duiven, Netherlands

Alicat Europe

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