#Product Trends
【Semiconductor Industry Application】Ultrasonic Hole Drilling Solutions for Hard-Brittle Materials
Ultrasonic Machine Tool + Solid PCD Drill
Driven by the rapid development of modern technology, the semiconductor market is expanding with each passing day. Following this trend, China and other major countries across the world are taking significant steps to boost semiconductor production, trying to meet the surging demand for high value-added chips with their own R&D and manufacturing capabilities.
Given their importance in high-end manufacturing, semiconductor parts have high requirements for workpiece surface quality and nanometer-level accuracy. Since most semiconductor processing components are made of hard-brittle materials, chipping, short tool life and low efficiency are the common challenges faced by most manufacturers.
And here is exactly where Conprofe’s Ultrasonic Machine Tools, Solid PCD Micro-edge Cutting Tools and Precision Ultrasonic Tool Holders come into the scene. Our tons of successful application examples and years of experience demonstrate excellent performance of our hybrid solutions, especially in micro-hole drilling. Customers benefit from shorter cycle time, improved quality, higher yield and more stable production.
[Case Sharing]
Applications of Conprofe’s Ultrasonic Machining Solution:
1.Single-Crystal Silicon Showerhead Micro-Hole Drilling
Key words: Deep micro-hole drilling
Workpiece: Single-Crystal Silicon Showerhead
Hole Dimension: D0.48x18mm (Depth-to-diameter ratio 37.5:1)
Challenge:
· Failure to meet deep hole machining requirements
Solution:
Conprofe Ultrasonic Precision Engraving & Milling Center ULM-600
+ Conprofe Solid PCD Micro Drill
Benefits:
✓ Chipping at hole entries＜0.03mm
✓ Position accuracy＜0.01mm
✓ Tool life up to 1,000+ holes
2.Quartz Glass Showerhead Micro-Hole Drilling
Key Words: Efficient blind hole drilling
Workpiece: Quartz Glass Showerhead of Hardness HV700
Dimensions: D280mm
Hole Requirements: Evenly distributed D0.5x5.0mm blind holes (Depth-to-diameter ratio 10:1)
Challenges:
·Low machining efficiency
·Hole edge chipping
Solution:
Conprofe Ultrasonic Precision Milling Center UGM-500
+ Conprofe Solid PCD Drill
Benefits:
✓ Continuously machining 1,200 holes (D0.5x5mm, depth-to-diameter ratio 10:1）with
ONE Solid PCD Drill
✓ Cycle time down by 72% (from 270s to 75s)
✓ Smooth hole wall with 68% chipping reduction (from 0.13mm to 0.13mm)
3. Silicon Carbide (SiC) Showehead Stepped Hole Drilling
Key Words: Micro holes drilling in hard-brittle material
Workpiece: Silicon Carbide Showerhead of Hardness HV1,800
Hole Dimensions: D0.5x6.5mm/D1x6.5mm
Challenges:
·High hardness of material and chipping issue
·Small hole diameter and high depth-to-diameter ratio
·Highly dependent on imported machining technologies
Solution:
Conprofe Ultrasonic Precision Milling Center ULM-500
+ Conprofe Solid PCD Drill
Benefits:
✓ Continuous and stable machining of 100 micro holes
✓ Excellent hole wall quality (chipping＜0.02mm)
4. Single-Crystal Silicon Showerhead Hole Drilling
Key Words: Consecutively drilling 6,000+ holes in hard-brittle material
Workpiece: Single-Crystal Silicon Showerhead
Hole Dimensions: D0.65X15mm, depth-to-diameter ratio 23:1
Challenges:
· Chipping issue
· Low machining accuracy
· Short tool life
Solution:
Conprofe Ultrasonic Precision Milling Center ULM-600
+ Conprofe Solid PCD Drill
Benefits:
✓ No chipping at hole edges
✓ Significant dimensional and position accuracy improvement
✓ Continuous and stable machining of 1,200 holes
✓ Tool life exceeding 6,000+ holes
No chippings at the hole edge
5. Aluminum Oxide (Al₂O₃) Showerhead Hole Drilling
Key words: Hole drilling in hard-brittle material
Workpiece: Aluminum Oxide Showerhead of Hardness HV1,400
Dimensions: D0.5x3.2mm/D1x5.8mm
Challenge:
· Short tool life
Solution:
Conprofe Ultrasonic Precision Milling Center ULM-400
+ Conprofe Solid PCD Drill
Benefits:
✓ Excellent hole wall surface quality and dimensional accuracy
✓ 34% tool life improvement
Contact us to learn more about our state-of-the-art Ultrasonic Machine Tools!
Tel/WhatsApp: +86-138 2607 9999 (Ms. Esther HU, Senior Sales Director)
Email: yueyao.hu@conprofetech.com
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https://www.conprofetech.cn/
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