THM50X Temperature and Humidity Transmitter｜ Absolute Humidity Measurement and 0.1%RH Ultra-Low Humidity Detection for Semiconductor Processes

THM50X Temperature and Humidity Transmitter｜ Absolute Humidity Measurement and 0.1%RH Ultra-Low Humidity Detection for Semiconductor Processes

Semiconductor processes have extremely strict humidity requirements. In stages such as post-clean drying, pre-packaging processes, inert gas purging areas, storage of humidity-sensitive materials, and critical environmental control zones, even slight fluctuations in environmental moisture may affect yield. Relying solely on relative humidity can easily lead to misjudgment due to temperature changes, making it difficult to determine whether the drying process has truly been completed. Therefore, absolute humidity, which directly presents the actual water vapor content in the air, becomes a more reliable basis for judgment. In addition to semiconductors, low-humidity processes in biotechnology and pharmaceuticals, food drying and aging, high-temperature chemical processes, laboratories, and test chambers also require precise, stable, and fast-responding temperature and humidity transmitters.

The THM50X temperature and humidity transmitter directly measures absolute humidity and simultaneously provides temperature, relative humidity, and dew point along with several other humidity-related parameters. This allows engineers not only to see %RH but also to understand “how much water is actually present in the environment.” Combined with 0.1%RH ultra-low humidity resolution, a high-temperature-resistant probe, and multi-parameter display, users can maintain accurate interpretation even under more complex and demanding process conditions, ensuring product quality and process stability.