Ultra low flow rate control for liquid from 0.001cc/min

The LF-F/LV-F series has been used in in various fields.

The flow rate sensor in the LF-F/LV-F series of fine mass flow controllers for liquids consists of an electronic cooling element

that is in contact with a capillary tube, as well as several temperature detection elements.

When the liquid flowing, the sensor detects the tempurature rise corresponding to the flow rate and displays it as a flow rate.

Unlike methods where heat is added, this cooling method enables flow rate mesurement of liquid with low boiling points.

It also prevents problems with interference due to the influence of secondary discharge (vaporization) and makes accurate

flow rate measurements possible.