Compact XY+Rotary stage

Compact precision XY stages

XY-Rotary stages with linear motors and direct torque motors designed with a low profile for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive linear motor drive provides sub-micron XY positioning and direct drive rotary stage assures sub-arcsec performance.

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324 Second Street Pike, Southampton, PA 18966, USA

IntelLiDrives, Inc.

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Combination Lift and Rotary stages

INTEGRATED LIFT-ROTARY SYSTEM

The demand for a high accuracy, compact LIFT-ROTARY stages is met with IntelLIDrives technologies that address the unique needs of scanning microscopy, wafer and printed circuit board inspection, automated assembly and wide range of specimens and samples scanning in many types of imaging techniques and micro-machining applications. These stages can be motorized with s...

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XYZ gantry with linear motors

High precision XYZ system

IntelLiDrives, Inc. manufactures a large selection of XYZ Robots that utilize brushless linear direct-drive servomotors, linear stepper motors as well as precison ball screw actuators driven with brush, brushless or rotary stepper motors. Travels for our linear actuators range from 10 mm to 5 meters. These stages are utilized in in industrial robots, fiberoptics and phot...

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LARGE APERTURE ULTRA-THIN ROTARY TABLES

Aperture 260 mm, Thickness 22 mm

ULTRA-THIN DIRECT DRIVE ROTARY SERVO TABLE ACR-260UT Performance:  Center aperture 260 mm  Ultra-low height 22 mm  Speed 0.1 rpm to 300 rpm  Positioning to 0.25 arc-sec Features:  Direct drive (no gears)  Pancake design  Brushless motor design  Precision bearing system  Integrated position feedback  Lightweight  Matching servo amplifier/indexer

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Products associated

XY stage

XYR-65-10X10-AUT-ACR-65AUT

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