TRUMPF Power electronics company News and Trends items

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Posted on 2/2/2016

When manufacturing complex microstructures, reproducible plasma processes are the key to consistent results. Thanks to stable power output and a high level of control precision, TRUMPF RF generators offer the best conditions to achieve such results. Now the company has further optimized its innovative RF technology. The TruPlasma RF Series 1000 (G2/13) and the TruPlasma RF 3006 (G2/13) come equipped with additional features to ensure stable processes, increased efficiency, and simple system integration.

New: “Smart Auto Frequency Tuning” for stable processes TRUMPF RF generators guarantee an extraordinarily stable power supply as a result of CombineLine, its tried-and-trusted RF coupling technology, which is unique to the market. A new technology now ensures that processes are even more stable. In contrast to current approaches, the integrated “Smart Auto Frequency T...

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The newest generation of RF generators

Posted on 9/11/2015

The occurrence of arcing on the magnetron is a known problem in reactive sputtering. Arcs occur, on the one hand, because of the high current densities in the magnetron plasma and on the other hand because of the condition of the cathode surface.

To guarantee outstanding surface quality, the plasma generator used must detect and extinguish arcs. This is a major challenge because the generator must detect, as early on as possible and reliably, the current increase or the collapse of the cathode voltage, quickly shut off the power output and, within just a few half waves reach full capacity again. The TruPlasma...

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New white paper on arc management

Posted on 6/26/2014

Now, with the TruPlasma RF 3012, no more compromises are necessary. This new high-frequency generator from HÜTTINGER Elektronik demonstrates an 80 percent degree of efficiency, which makes it unique to the market and it is also extremely robust and reliable. This is possible due to an innovative class D converter topology combined with a patented high-frequency power cou...

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RF technology without compromises

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