MEMS Pressure Sensor

MEMS Pressure Sensor

Based on MEMS technology and SOP, DIP, COB packages etc., MEMS series pressure sensors are designed for pressure measurement of non-corrosive pure gases. Our MEMS pressure sensor features as below:

MPM160 Piezoresistive Pressure Sensor

(1) Pressure range: -100kPa~10kPa…200kPa

(2) Gauge or Negative Pressure

(3) SOP or DIP Package

(4) Optional for pin direction

2.MEMS Measurement Principle

The core part of MEMS pressure sensor is a piezoresistive pressure sensing die processed by MEMS technology. The pressure sensing die is composed of a springy diaphragm and four resistors integrated in the diaphragm. Four piezo-resistors form a Wheatstone bridge structure.

When the springy diaphragm is pressured, Wheatstone bridge will output linear proportional voltage signal with the pressure on. Without pressure changes, there is no output thus consumes few power.

Applications

Relying on features of small size, low cost etc. MEMS pressure sensor is widely used in biomedicine, automotive electronics and so on.

·For medical fields, such as electronic sphygmomanometer, breathing machine, oxygen generating equipment, patient monitor etc.

·For automotive electronics fields, such as tire pressure gage, brake booster, power steering and MAP sensor etc.

·For small home appliance fields, such as water heater, dish washer, water purifier, small crisper etc.

·For wearable equipment fields, such as intelligent bracelet, watch etc.

·For fitness equipment fields, such massagers, massage chairs, air beds etc.

·Other fields, such as vacuum pump, vacuum generator, compressor, pressure meters etc

Micro Sensor aims to provide products and solutions of pressure, temperature and flow measurement. For more details, feel free to contact us via sales@microsensor.cn.