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#White Papers

The advantages of HighVacuum AFM for electrical measurements of #2D materials.

Electrical Scanning Probe Microscopy

In this appnote, the researchers at imec illustrate the advantages of high vacuum for electrical measurements utilizing the capabilities of the Park NX-Hivac AFM. They use conducting #SPM (CAFM and STM) to study electrical properties of MoS2, both in ambient and high vacuum (#HV) condition. Despite the presence of oxide layer, clear, homogeneous, and higher current signal was measured while in HV condition. The results emphasize the importance of multidirectional and multichannel analysis on 2D materials, including the transition metal dichalcogenides (TMDs) that are of high interest for the semiconductor industry.


  • 109 Gwanggyo-ro, Yeongtong-gu, Suwon, Gyeonggi-do, South Korea
  • Park Systems