A4 series of dry pumps

Pfeiffer Vacuum presents innovative vacuum solutions

at the trade fairs Semicon Korea and Semicon China

Pfeiffer Vacuum, a leading global supplier of vacuum technology, will be exhibiting at the Semicon Korea Trade Fair in Seoul from January 27 to 29 and Semicon China in Shanghai from March 15 to 17. Visitors to the booth can discuss innovative vacuum solutions with experts from Pfeiffer Vacuum. “We are pleased to present important new vacuum solutions at the trade fairs Semicon Korea and Semicon China. In an increasingly changing competitive environment, Pfeiffer Vacuum is ideally set up as a rock-solid company, acting in the global arena as a reliable, long-term allround provider of vacuum technology for customers all over the world“, says Eric Taberlet, President of the Business Unit Semiconductor & Coating.

The dry, multi-stage Roots pumps in the A4 series provide pumping speeds of 100 to 2,300 m3/h. These energy-efficient and reliable pumps are ideal for use in demanding processes in the semiconductor and coating industries. With corrosion resistant materials and a high gas throughput, this pump series is optimally suited for use in CVD processes, for example.