Miniature Linear and Rotary Stages: Precise – Cost-Efficient – Easy to Stack

With a width of only 22 mm, travel ranges of up to 26 mm and a resolution to 1 nm in closed-loop operation, the LPS-22 is one of the smallest precision linear stages available on the market. Small in size, these linear stages achieve nevertheless velocities of up to 10 mm/s.

The rotary stages of the RPS series, the smallest diameter of the rotating platform being at 14 mm, attain velocities of up to 45°/s.

These miniature linear and rotary stages are piezomotor-based drives. Thanks to this drive principle, small stages sizes with high resolution can be realized, making this series perfectly suited for precision positioning in applications where space is limited and for vacuum environments to 10-9 hPa.

The linear and rotary stages can be stacked directly to XY linear or XYƟZ configurations with rotary stages, no adapter is needed for this.

PI miCos in Brief

The miCos GmbH was founded in Eschbach near Freiburg, Germany, in 1990. As PI miCos, it now belongs to PI Group (Physik Instrumente), located in Karlsruhe, Germany. With currently more than 50 employees, the company develops, produces and markets innovative motion systems and components for high-precision positioning applications throughout the world. A main focus is on optical metrology in research and industry. For this purpose, PI miCos offers customized system solutions with multiple axes in addition to a comprehensive standard program. Wide-ranging application know-how guarantees the implementation of technically demanding solutions. Flexible positioning systems for ultrahigh vacuum applications are a good example of this, as are parallel-kinematic Hexapods with six degrees of freedom and systems with air bearing axes for highest running accuracy.