X-Y Positioning - 6 Axis Precision Stage and Controller

6 Axis Precision Stage and Controller for Nano-Alignment

PI (Physik Instrumente) L.P. - a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications - offers the improved F-206.S, 6-axis nano-alignment system which provides high resolution 6D motion, a user programmable pivot point and powerful alignment software at a very competitive price.

Typical Applications

Nanomanipulation (Life Sciences), Nanotechnology, MEMS Alignment, Micro-Machining, Photonics Alignment & Packaging, Collimator / Array Alignment, Optical Device Testing, Semiconductor Handling Systems, Microsurgery,

Features & Advantages

Compact, Six-Axis Parallel-Kinematics Nano-Alignment System

Only one Common Moving Platform: Lower Inertia, Faster Response & Settling

Programmable Pivot Point: Fully Virtualized Center of Rotation

Powerful 6-Axis-Digital Controller with Alignment Routines & LabViewTM Drivers: Significantly Reduces User's Programming Efforts

Very Precise: Backlash-Free Flexure Joints, 0.033 µm Actuator Resolution

No Moving Cables: Reduced Friction, Improved Reliability, Easy Integration

How does is the F-206 Differ from other Positioning & Alignment Systems?

The "parallel-kinematics" design with backlash-free flexure joints, a virtual pivot point and vector-based 6D motion-controller is what sets the F-206.S system apart from conventional "stacked" positioning tables. Due to the reduced moving mass (only one light-weighted common platform for all 6 actuators) the system can respond and settle much faster than conventional multi-axis motion systems. It is also considerably more compact and accurate than multi-axis stage stacks (serial kinematics). Its parallel-kinematics design and specialized digital 6D Hexapod controller minimizes unwanted crosstalk motion. The F-206.S hexapod comes with powerful alignment software, LabViewTM drivers and DLLs.

Superior Flexibility Due to Programmable Virtual Pivot Point

The superior flexibility of the Micro-Hexapod is based on the virtual-pivot-point capability provided by its industry-class 6-degree of freedom controller. Since Hexapod motion is not determined by fixed bearings but rather by sophisticated, real-time, 6-space control algorithms, this point can be chosen freely with a single software command - a prerequisite for fast and accurate alignment tasks.

Automatic Optical Alignment

With an optional photometer card and powerful alignment software, the F-206.S aligns arrays, waveguides & collimators up to 10 times faster than conventional systems.