Application of High Voltage Power Supply in Ion Beam

Application Specification

Ion Beam

An ion beam is a beam produced by accelerating ions at high speeds. Ions are positively or negatively charged atoms or groups of atoms. Ion acceleration is the movement of ions to their destination by applying an arbitrary voltage. The momentum of the accelerator is proportional to the applied voltage. According to the application of ion transfer, the electrodes that apply voltage are acceleration electrode, extraction electrode, suppression electrode, deflection electrode, deflection electrode, etc. They are used in ion engines, ion beam sputtering, ion implantation, focused ion beam (FIB), and accelerators. In order to prevent the potential inside the device from being biased towards the accelerated ion potential, in some cases it is possible that it will be electrically neutralized by accelerating ions to produce ions.

To generate an ion beam for the FIB, a liquid metal ion source (LMIS) consisting of needle-like tungsten wires connected with gallium is used. When the filament is heated and a voltage is applied to the extraction electrode, an ion beam is generated from the tip. The resulting ions are then controlled by the electric and magnetic fields of the accelerator, forming a narrow directional flow. Ion beam control is used for ion beam scanning. The ions extracted from the ion source are focused by a condenser lens (CL) and the ion beam is scanned by an electrostatic deflector. Ion beams are used in a wide range of applications, such as ion beam injection, ion beam processing, and scanning ion microscopy (SIM).

An ion beam generator consists of an ion source (ion gun), an electromagnetic lens in an accelerator and a deflector. Ion beams are passed through accelerators for the injection of impurity ions into semiconductors, surface cleaning through ion milling, surface treatment, surface modification, and surface and internal analysis. The ion beam is accelerated and decelerated in a vacuum by an electric field and deflected by a magnetic field.

Ion mass separation is carried out by bending ions in a magnetic field, and energy analysis is carried out by decelerating electric field method and static electric field deflection analysis.

Wisman offers a wide range of power devices for ion acceleration, extraction, suppression, deflection, focusing, meshing and neutralization. Wisman power supplies for electrostatic deflectors are available in a wide range of specifications, in particular we offer high-voltage amplifiers with the highest level of response speed in the world. With DC bias function, you can easily adjust the scanning reference point of the scan.

Ion beam Power Supply:

SEM, HEM, EM