SONOTEC with Compact Flow Meter Series for Semiconductor Applications at ICPT Conference

From October 15 - 18, 2024, the 19th International Conference on Planarization / CMP Technology takes place in Wiesbaden, Germany. SONOTEC presents its compact SEMIFLOW® sensor series designed for contactless liquid flow measurement.

For the first time SONOTEC participates at the International Conference on Planarization / CMP Technology (ICPT) in Wiesbaden, Germany. As one of the event sponsors, the ultrasonic specialist presents its compact flow meters and air bubble detectors at booth 25 to the attending semiconductor professionals.

Focusing on chemical mechanical planarization / polishing (CMP), the conference provides excellent opportunities for discussions on technologies, CMP fundamentals, polishing processes, consumables, equipment as well as environmentally friendly equipment and new applications, metrology, cleaning, defect control, process control and much more. The conference is the perfect event for researchers and engineers to meet, discuss and share experiences in their field of knowledge.

In order to efficiently measure and monitor the transfer and dispensing of chemicals and other liquids within a fab, SONOTEC has developed the compact and robust SEMIFLOW flow meter series, which meets the special requirements of the semiconductor market. The state-of-the-art sensor series can be used, for example, to measure slurry dispensing in CMP processes and to monitor the filling volume of etching processes in wet bench lines. The industry leader in non-contact ultrasonic measurement technology will be presenting its wide range of precise and reliable non-contact flow sensors and air bubble detectors at the conference.

“Real-time sensor data can be used to improve process efficiency, reliability and product quality, ultimately leading to better manufacturing results and cost savings. For example, real-time monitoring of critical process parameters such as flow rate enables process stability and product quality to be maintained. In addition, sensor data patterns can detect early warning signs of equipment degradation or malfunction, allowing proactive maintenance interventions to avoid costly downtime and production rejects", explains Anika Baumhauer, International Strategy and Sales Manager at SONOTEC.

SEMIFLOW flow sensors reliably measure abrasive, adherent, corrosive, and ultra-pure liquids on industry-specific rigid plastic tubes and pipes. The clamp-on contact-free architecture eliminates any risk of contamination and leakage. Hence, the ultrasonic sensors are suitable for highly sensitive semiconductor manufacturing processes requiring highest accuracy and process stability. Additionally, the contactless measurement method does not cause any wear or tear for the sensor; the clamp-on ultrasonic sensors are maintenance-free.

The robust sensor material allows a long product life cycle and their minimal power consumption ensures low operating costs. Thus, the non-contact flow meters can contribute to sustainability strategies in the fabs. The SEMIFLOW sensors are also characterized by their compact housing design with integrated electronics. They require little space in the plant and can be easily integrated into existing process chains and architectures. SONOTEC offers the SEMIFLOW series in different sizes to cover a wide range of diameters of PFA, PTFE and other hard plastic tubing.

In order to measure flow rates in hazardous environments, SONOTEC offers the SEMIFLOW CO.66 PI Ex1 sensor series. The intrinsically safe ultrasonic flow meters are designed for safe operation in production areas classified as Zone 1 according to ATEX/IECEx. The sensors are protected against explosion hazards caused by gases and vapors according to the standards of gas group IIB; the equipment protection level (EPL) is "Gb".

Meet SONOTEC at ICPT in Wiesbaden, Germany, from October 15-18, 2024 at booth #25.