Vacuum Measurement in Loadlocks

One Sensor for the Entire Cycle

Loadlocks in semiconductor manufacturing typically require multiple pressure sensors – resulting in integration effort, contamination risk, and unnecessary complexity. The VSL vacuum transducer replaces them with a single device, covering the entire measurement range from 1200 to 10⁻⁴ mbar.

Fewer components. Less risk. Greater process reliability.
In semiconductor manufacturing, every particle counts – and so does every second in the process. Loadlocks are a critical bottleneck: they enable controlled transfer between atmosphere and vacuum environments while protecting process chambers from contamination and keeping cycle times efficient.

The reality in many systems:
Multiple sensors for different pressure ranges, high integration effort, and complex process coordination.
There’s a simpler way.

The VSL vacuum transducer reduces this complexity to a single device.
By combining two piezoresistive diaphragm sensors with a Pirani sensor, the VSL covers a measurement range of 1200 … 10⁻⁴ mbar (absolute) and -1060 … +340 mbar (relative to atmosphere).
During pump-down and venting phases, the piezo sensors provide fast (40 ms), gas-independent, and precise measurements (0.3% of full scale). In the low-pressure range, the Pirani sensor ensures stable, reproducible transfer conditions to the process chamber.

Less Complexity, Lower Contamination Risk
The fully metal-sealed design eliminates the need for an elastomer-sealed relative pressure sensor. Instead, differential pressure is calculated from chamber and ambient pressure – ensuring maximum helium tightness and reliable door-open triggering at pressure equalization.
Individual temperature compensation of each sensor guarantees excellent long-term stability and high reproducibility.
The result: maximum process stability – without compromise.

Fast Integration, Flexible Use
With interfaces like RS485, EtherCAT, and PROFINET, the VSL integrates seamlessly into existing systems. Two freely configurable relay switch points can be assigned to any sensor function, such as detecting pressure equalization between loadlock and environment.

An optional backlit LCD display enables direct pressure readout at the point of measurement.