#Product Trends
Alumina Ceramic Parts as Photolithography Machines in the Semiconductor Industry
Alumina Ceramic Parts used in Photolithography Machines
Alumina Ceramic parts are used for rotating parts in photolithography machines and in a vacuum state. This requires extremely high machining accuracy, and the runout of the inner circle is required to be within 2 microns.
Fine ceramics have become key components of semiconductor equipment. Especially in high-end lithography machines, in order to achieve high process accuracy, it is necessary to widely use ceramic components with good functional composite, structural stability, thermal stability, and high dimensional accuracy.Such as E-chuck, Vacumm-chuck, Block, magnetic steel skeleton water-cooled plate, reflector, guide rail, etc.
