New white paper on arc management

The occurrence of arcing on the magnetron is a known problem in reactive sputtering. Arcs occur, on the one hand, because of the high current densities in the magnetron plasma and on the other hand because of the condition of the cathode surface.

To guarantee outstanding surface quality, the plasma generator used must detect and extinguish arcs. This is a major challenge because the generator must detect, as early on as possible and reliably, the current increase or the collapse of the cathode voltage, quickly shut off the power output and, within just a few half waves reach full capacity again.

The TruPlasma MF Series 7000 (G2) is designed to do just that. Equipped with an intelligent arc management system, it is able to detect arcs in real time. To learn about how this new technology works and the advantages it offers, read our new white paper "Arc Management". Click on the link below (More information) to download.