#Product Trends
Boron Nitride Ceramics (BN) Parts For Plasma Chambers
Boron Nitride Ceramics (BN) Parts For Plasma Chambers
Boron Nitride is often referred to as “white graphite” since it has similar layer structure as graphite. They have excellent high temperature resistance properties, including high dielectric strength, thermal conductivity and excellent chemical inertness, which can solve the challenges of some of the most demanding application fields.
Boron nitride ceramics (BN) are unique in plasma environments for their resistance to sputtering and low propensity to generate secondary ions, even in the presence of strong electromagnetic fields. Sputter resistance helps extend component life, while low secondary ion generation helps maintain the integrity of the plasma environment. Therefore, boron nitride ceramics (BN) are widely used to confine the plasma arc in the sputtering chamber to the target material and prevent the erosion of integral components in the process chamber.
