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BN Ceramics for PVD ALD and CVD Systems

BN Ceramics for PVD ALD and CVD Systems

Talking about the deposition techniques we have to mention Physical Vapor Deposition (PVD), Atomic Layer Deposition ( ALD) and Chemical Vapor Deposition (CVD) , which are fundamental in manufacturing high-precision components for semiconductors, electronics, aerospace industries even more. The versatility and properties of Boron Nitride (BN) ceramics make them become crucial components in PVD, ALD and CVD systems. Here I like to talk about the role of BN ceramics in these systems.

Details

  • Xiamen, Fujian, China
  • Xiamen Innovacera Advanced Materials Co., Ltd