Sulfur hexafluoride remains essential as a trace, protective, and insulating gas in many industrial processes. Given its high global warming potential, accurate monitoring is critical.

The MicroFLOW SF6.100 Vol.-% sensor is suitable for a wide range of demanding applications that require precision and reliability.

Technical highlights:

• < 1% max. deviation with 10-point linearization across the full 0-100 vol.-% range

• Integrated µP.sens pressure sensor in the cuvette block for real-time pressure compensation (< 0.15% FS / 10 hPa)

• Temperature-compensated (5-45 °C) with max. deviation < 1% per 10K

• Fast response time < 5 s, digital resolution 0.001 vol.-%

• Wide operating conditions: 300-1200 hPa, 5-45 °C, < 1 W power consumption

Applications span from semiconductor plasma etching and aluminum production monitoring to high-voltage insulation diagnostics.

With its compact form factor, integrated compensation sensors, and 40,000 h operating life, the MicroFLOW SF6 is engineered for reliable inline monitoring even under variable process conditions.

Have a look in the online shop: https://shop.microhybrid.com/en/microflow-sf6-100-vol